Isotope¹¹BF₃

BF₃ PURITY ≥ 99.99 %

¹¹B（Isotopic Enrichment ) ≥99.8 %

N₂ < 15ppmv

O₂ / Ar < 15ppmv

CO₂ < 15 ppmv

SO₂ < 15 ppm

HF < 15 ppmv

SiF₄ < 15 ppmv